VACUUM SCIENCE BLOG

This blog is based on the article in Applied Science and Convergence Technology 26 (5): 95-109 (2017) R Grinham and A Chew.

There are four main ways you can reduce outgassing in your vacuum system. These are: cleaning and handling, surface treatment, passivation, and purging and backfilling. In this blog, we will take a closer look at each of these methods. 

This blog is based on the article in Applied Science and Convergence Technology 26 (5): 95-109 (2017) R Grinham and A Chew.

There are several contributions to the gas load of a system. At pressures below ~0.1 mbar, the most dominant is often ‘outgassing’. Outgassing is the result of desorption of previously adsorbed molecules, bulk diffusion, permeation and vapourisation. Adsorption occurs via two main processes, physisorption and chemisorption, and can be described using five (or six) classifying isotherms.