Over the years, vacuum pumps have evolved to dry versions (no oil in the swept volume), robust, process specific, low power consumption and reduced footprint. With this shift in the industry, it was great to hear a range of discussions around this during the 10th Vacuum Symposium UK.
This was held at The Ricoh Arena in Coventry on the 9th-10th of October 2019 and chaired by Dr Sunil Patel of STFC Rutherford Appleton Laboratory and Dr Andrew Chew of Atlas Copco Scientific Vacuum Division.
The event
The development and introduction of dry pumping and successive generations were discussed relevant to drivers of larger wafers (and gas flows), the reduction of power and pump size. Future trends included a discussion of the continual introduction of new materials with associated new precursor and by-product challenges.
60+ years of ion pumps from invention to latest developments was presented by Maouro Audi of Agilent Technologies and chartered the history of ion getter pumps and their applications over the decades; the reduction in required power being especially highlighted. The latest developments were also discussed including a new combination of magnetic field and cell dimensions to produce the first ion pump with pumping speed maximised in the low pressure range, minimization of charged particle emissions and a combination with NEG pumps.
The highlight of the event was the presentation on the developments of dry pumps and abatement techniques in parallel to the developments and demands of the semiconductor and display producers, from Mike Thompson of Edwards. This charted the evolution of application challenges and customer requirements on vacuum pumps from the 1980s.
The development and introduction of dry pumping and successive generations were discussed relevant to drivers of larger wafers (and gas flows), the reduction of power and pump size. Future trends included a discussion of the continual introduction of new materials with associated new precursor and by-product challenges.
The main applications challenge in the 1980s was the process by-products such as the condensation of ammonium chloride, silicon dioxide powders and corrosive and flammable gases e.g. silane. Dry pumps replaced oil-sealed rotary pumps and generated a range of benefits including an improved operating period, reduced total operating costs and a clean environment compatible with the needs of the industry.
Enrico Maccallini of SAES Getters presented Non Evaporable Getters: evolution and experience of more than 40 years. This explored how NEG pumps have been developed since the 1970s and their adoption across industry, R&D laboratories and accelerators, with a special emphasis on the capability to pump hydrogen. Recent developments in ZAO® alloy were shown with the benefit of extending to the high vacuum pressure range.
Kris Haran of Pfeiffer Vacuum presented Dry versus wet pumps – different dry pump principles. The development of dry pumps having not reduced the ongoing popularity and application of OSRV wet pumps. A poster session was held during the lunch interval and the Harry Leck Memorial Medal for 2019 was presented to Dr Alan Webb for his significant contribution and understanding of plasma chemistry, plasma physics and thin films in both business and academic positions.
Other meetings included the Structure and Dynamics of Surfaces and Interfaces (with the BVC 60th anniversary presentation from 2019 IUVSTA Prize for Science winner Prof Phil Woodruff); Thin Films and Coating Technologies for Science and Industry; 17th Technology Plasma Workshop and Surface Analysis- The Changing Composition at the Surface.
The event ended with a presentation by Jonty Bray of MKS Instruments who discussed the fascinating historical development of gauging over the last four centuries. The technologies and characters who developed them and the drivers for new gauging was greatly appreciated by the audience.
Seven Vacuum Technology Training Courses were run for newcomers to the field as well as those wishing to expand their knowledge further into UHV and techniques such as Leak Detection and Residual Gas Analysis.
The vacuum symposium was co-located with VacuumExpo. Nearly 40 companies exhibited from across the industry of vacuum techniques, products and applications. The new nXRi multi-stage roots shown by Edwards Vacuum being one of the highlights.
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